Holographic interferometry deformations metrology by using AR modeling

Rabah Mokdad; Idriss El-Hafidi; Patrick Meyrueis

doi:10.1117/12.544098

17 August 2004 Holographic interferometry deformations metrology by using AR modeling

Rabah Mokdad, Idriss El-Hafidi, Patrick Meyrueis

Proceedings Volume 5458, Optical Micro- and Nanometrology in Manufacturing Technology; (2004) https://doi.org/10.1117/12.544098
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

The frequency of the holographic fringe signal is proportional to the measured object deformation or displacement. Fast Fourier transform (FFT) is the most commoly used signal processing technique for analyzing output fringes. One problem with this approach is that a long data acquisition is required to achieve adequate deformation resolution, typically 5 to 10 fringes are needed. We propose using an autoregressive (AR) model to obtain with the same advantages deformation of an opaque object using holographic interferometry. This deformation will be estimated directly from the model parameters. The theoretical and experimental results obtained indicate that the proposed method has a good accuracy by using a small number of fringes.

Citation Download Citation

Rabah Mokdad, Idriss El-Hafidi, and Patrick Meyrueis "Holographic interferometry deformations metrology by using AR modeling", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.544098

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