Metrology of refractive microlens arrays

Kenneth J. Weible; Reinhard Volkel; Martin Eisner; Samuel Hoffmann; Toralf Scharf; Hans-Peter Herzig

doi:10.1117/12.545458

17 August 2004 Metrology of refractive microlens arrays

Kenneth J. Weible, Reinhard Volkel, Martin Eisner, Samuel Hoffmann, Toralf Scharf, Hans-Peter Herzig

Proceedings Volume 5458, Optical Micro- and Nanometrology in Manufacturing Technology; (2004) https://doi.org/10.1117/12.545458
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

The metrology of refractive microlens arrays is analyzed using Twyman-Green, Mach-Zehnder, and white light interferometers. The advantages and limitations of each are discussed in their application to the measurement of spherical and aspherical microlens arrays.

Citation Download Citation

Kenneth J. Weible, Reinhard Volkel, Martin Eisner, Samuel Hoffmann, Toralf Scharf, and Hans-Peter Herzig "Metrology of refractive microlens arrays", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.545458

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