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16 June 2004 Recent advances in the development of coherent and incoherent UV and EUV discharge sources
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Proceedings Volume 5479, Laser Optics 2003: High-Power Gas Lasers; (2004) https://doi.org/10.1117/12.558204
Event: Laser Optics 2003, 2003, St. Petersburg, Russian Federation
Abstract
We report on the experimental status of the development of compact high power (up to 500 W) high repetition rate (up to 6 kHz) excimer lasers and discharge produced plasma sources radiating in an extreme ultraviolet (EUV) region. EUV power more than 70 W (around 13.5 nm wavelength, a bandwidth of 2%) into 2π sr at 1250 Hz was obtained for continuous operation of a source.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir M. Borisov, Andrei I. Demin, A. Eltzov, Alexander S. Ivanov, Oleg B. Khristoforov, Yuriy B. Kirykhin, Aleksandr Yu. Vinokhodov, V. A. Vodchits, Valentin A. Mischenko, and Alexander V. Prokofiev "Recent advances in the development of coherent and incoherent UV and EUV discharge sources", Proc. SPIE 5479, Laser Optics 2003: High-Power Gas Lasers, (16 June 2004); https://doi.org/10.1117/12.558204
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