Additional error sources for microscopic laser Doppler measurements

Christian Rembe; Alexander Draebenstedt

doi:10.1117/12.579565

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22 June 2004 Additional error sources for microscopic laser Doppler measurements

Christian Rembe, Alexander Draebenstedt

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Proceedings Volume 5503, Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2004) https://doi.org/10.1117/12.579565
Event: Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 2004, Ancona, Italy

Abstract

Laser-Doppler Vibrometry has been proven to be an accurate method to measure vibration amplitudes with a known error budget. Therefore, vibrometer technique is used to realize primary standards in vibration-amplitude measurements at national metrology institutes (e.g. Physikalisch Technische Bundesanstalt PTB in Germany). However, additional error sources emerge for vibrometer measurements at microscopic structures. This paper discusses two error sources that can be neglected for usual macroscopic testing but can become important for microscopic measurements.

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Christian Rembe and Alexander Draebenstedt "Additional error sources for microscopic laser Doppler measurements", Proc. SPIE 5503, Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 June 2004); https://doi.org/10.1117/12.579565

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