MEM-mirror design and analysis for tunable optical filters

Vikram Gogte; Mohammad A. Matin

doi:10.1117/12.566892

14 October 2004 MEM-mirror design and analysis for tunable optical filters

Vikram Gogte, Mohammad A. Matin

Proceedings Volume 5511, Tuning the Optical Response of Photonic Bandgap Structures; (2004) https://doi.org/10.1117/12.566892
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

In this paper, we will show modeling of MEM-mirrors for tunable optical filters and present the simulation results using ConventorWare software. The gold-plated micro-mirror is placed on InP/Air pair structure separated by air-gap. A voltage induced electrostatic force displaces the micro-mirror. Very wide tuning range of 149 nm is observed for InP/air-gap filters at low actuation voltage of 2.5V. To carry out optical simulation we developed a JAVA program that characterizes the reflectance spectra and the tuning behavior. These mirror designs can be utilized for optical communication and sensing applications in tunable optical filters.

Citation Download Citation

Vikram Gogte and Mohammad A. Matin "MEM-mirror design and analysis for tunable optical filters", Proc. SPIE 5511, Tuning the Optical Response of Photonic Bandgap Structures, (14 October 2004); https://doi.org/10.1117/12.566892

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