Environmentally friendly interferometry

Leslie L. Deck

doi:10.1117/12.559722

2 August 2004 Environmentally friendly interferometry

Leslie L. Deck

Proceedings Volume 5532, Interferometry XII: Applications; (2004) https://doi.org/10.1117/12.559722
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Combining spatial and time-domain processing in wave-front measuring interferometers is a powerful tool for reducing the influence of environmental disturbances on the measurement. Modern digital imagers and computing platforms eliminate most of the disadvantages typically cited against spatial processing techniques. The ability to perform both spatial and time-domain processing in a single instrument provides the greatest flexibility for precision metrology applications in both static and dynamic environments.

Citation Download Citation

Leslie L. Deck "Environmentally friendly interferometry", Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); https://doi.org/10.1117/12.559722

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