Translator Disclaimer
18 October 2004 New multilayer coating for 30.4-nm radiation
Author Affiliations +
A multilayer coating of Mo/Si is usually used as an EUV optics for space science, especially for He-II (30.4nm) radiation, because it is highly stable under vacuum and atmosphere. The fairly high reflectivity of 15-20% was achieved. But space science community will need higher reflective coating at 30.4 nm radiation for the future satellite missions. In this work, for developing new multilayer mirror of He-II radiations, we report the design of a multilayer, consisting of a pair of Mg and SiC, and its fabrication, and result of the reflectance with the monthly degradation under the atmosphere circumstance.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ichiro Yoshikawa and Tetsunori Murachi "New multilayer coating for 30.4-nm radiation", Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004);


High-temperature LPP collector mirror
Proceedings of SPIE (March 24 2006)
Characteristics of SiC/Mg multilayer mirrors
Proceedings of SPIE (October 06 2005)
Performance of newly developed Mg/SiC multilayer mirrors
Proceedings of SPIE (September 20 2007)
Development of Mg/SiC multilayer mirrors
Proceedings of SPIE (August 29 2006)

Back to Top