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3 November 2004 Synchrotron x-ray study of multilayers in Laue geometry
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Zone plates with depth to zone-width ratios as large as 100 are needed for focusing of hard x-rays. Such high aspect ratios are challenging to produce by lithography. We are investigating the fabrication of high-aspect-ratio linear zone plates by multilayer deposition followed by sectioning. As an initial step in this work, we present a synchrotron x-ray study of constant-period multilayers diffracting in Laue (transmission) geometry. Data are presented from two samples: a 200 period W/Si multilayer with d-spacing of 29 nm, and a 2020 period Mo/Si multilayer with d-spacing of 7 nm. By cutting and polishing we have successfully produced thin cross sections with section depths ranging from 2 to 12 μm. Transverse scattering profiles (rocking curves) across the Bragg reflection exhibit well-defined interference fringes originating from the depth of the sample, in agreement with dynamical diffraction theory for a multilayer in Laue geometry.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hyon Chol Kang, Gregory B. Stephenson, Chian Liu, Ray Conley, Albert T. Macrander, Jorg Maser, Sasa Bajt, and Henry N. Chapman "Synchrotron x-ray study of multilayers in Laue geometry", Proc. SPIE 5537, X-Ray Sources and Optics, (3 November 2004);


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