Measurement of the optical constants of Sc films in the extreme ultraviolet

Jose Antonio Aznarez; Juan Ignacio Larruquert; Jose Antonio Mendez; Sara Covini; Andrea Marco Malvezzi; Luca Poletto

doi:10.1117/12.556794

14 October 2004 Measurement of the optical constants of Sc films in the extreme ultraviolet

Jose Antonio Aznarez, Juan Ignacio Larruquert, Jose Antonio Mendez, Sara Covini, Andrea Marco Malvezzi, Luca Poletto

Proceedings Volume 5538, Optical Constants of Materials for UV to X-Ray Wavelengths; (2004) https://doi.org/10.1117/12.556794
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

The optical properties of thin Sc films deposited in ultra high vacuum conditions have been investigated in the 6.7-174.4 nm spectral range. Transmittance and multi-angle reflectance were measured in situ in the 53.6-174.4 nm spectral range and they were used to obtain the complex refractive index of Sc films at every individual wavelength investigated. Transmittance measurements were made on Sc samples that were deposited over grids coated with a support C film. The transmittance and the extinction coefficient of Sc films at wavelengths shorter than 30 nm were measured ex situ. The ex situ samples were protected with an additional top C film before removal from vacuum. The transmittance characteristics of Sc films make them a potential candidate for EUV filters.

Citation Download Citation

Jose Antonio Aznarez, Juan Ignacio Larruquert, Jose Antonio Mendez, Sara Covini, Andrea Marco Malvezzi, and Luca Poletto "Measurement of the optical constants of Sc films in the extreme ultraviolet", Proc. SPIE 5538, Optical Constants of Materials for UV to X-Ray Wavelengths, (14 October 2004); https://doi.org/10.1117/12.556794

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KEYWORDS

Transmittance

Reflectivity

Extreme ultraviolet

Refractive index

Scandium

In situ metrology

Reflectometry

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