Paper
4 November 2004 Development of x-ray pore optics: novel high-resolution silicon millipore optics for XEUS and ultralow mass glass micropore optics for imaging and timing
Author Affiliations +
Abstract
Producing the next generation of X-ray optics, both for large astrophysics missions and smaller missions such as planetary exploration, requires much lower mass and therefore much thinner mirrors. The use of pore structures allows very thin mirrors in a stiff structure. Over the last few years we have been developing ultra-low mass pore optics based on microchannel plate technology in glass, resulting in square, open-core glass fibres in a concentric geometry. The surface roughness inside the pores can be as low as 0.5 nm due to the extreme stretching of the surface during production. We show how improvements in the production process have led to an improved quality of the fibers and the quality of stacking the fibers in the required geometry. To achieve een higher imaging quality as required for XEUS we have developed in parallel a novel pore optics technology based on silicon wafers. The production process of silicon wafers is extremely optimised by the semiconductor industry, leading to optical qualities that are sufficient for high-resolution X-ray focussing. We have developed the technology to stack these wafers into accurate X-ray optics, set up automated assembly facilities for the production of these stacks and present very promising X-ray test results of 5.3 arcsec HEW from single reflection off such a stack, showing the great potential of this technology for XEUS and other high-resolution low mass X-ray optics.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marco Beijersbergen, Stefan Kraft, Marcos Bavdaz, David H. Lumb, Ramses Guenther, Maximilien Collon, Arjan L. Mieremet, Ray Fairbend, and Anthony Peacock "Development of x-ray pore optics: novel high-resolution silicon millipore optics for XEUS and ultralow mass glass micropore optics for imaging and timing", Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); https://doi.org/10.1117/12.552942
Lens.org Logo
CITATIONS
Cited by 16 scholarly publications and 1 patent.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
X-ray optics

Glasses

Semiconducting wafers

Silicon

Wafer-level optics

Mirrors

X-rays

RELATED CONTENT

Aberration-free silicon pore x-ray optics
Proceedings of SPIE (September 26 2013)
Silicon pore optics development for ATHENA
Proceedings of SPIE (September 04 2015)
The first light of a single stage MEMS x ray...
Proceedings of SPIE (October 03 2007)
Recent progress with x ray optics based on Si wafers...
Proceedings of SPIE (July 15 2008)
Novel x-ray optics with Si wafers and formed glass
Proceedings of SPIE (June 13 2006)

Back to Top