Development, test, and evaluation of MEMS micromirrors for free-space optical communications

Jeffry J. Sniegowski; Steven M. Rodgers; Bradley G. Boone; Jonathan R. Bruzzi; Chris W. Drabenstadt; Bernard E. Kluga; Eric W. Rogala; Robert Osiander; Keith J. Rebello; Margaret A.G. Darrin

doi:10.1117/12.562819

20 October 2004 Development, test, and evaluation of MEMS micromirrors for free-space optical communications

Jeffry J. Sniegowski, Steven M. Rodgers, Bradley G. Boone, Jonathan R. Bruzzi, Chris W. Drabenstadt, Bernard E. Kluga, Eric W. Rogala, Robert Osiander, Keith J. Rebello, Margaret A.G. Darrin

Author Affiliations +

Proceedings Volume 5550, Free-Space Laser Communications IV; (2004) https://doi.org/10.1117/12.562819
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

MEMX Corporation in collaboration with Johns Hopkins University Applied Physics Laboratory (JHU/APL) has developed micro-mirror technology applicable to free-space multi-access optical communications terminals. Based on their previously developed micro-electro-mechanical systems (MEMS) optical switches, these new units are being evaluated for applications on spacecraft. These devices must operate within very accurate digitally-controlled pointing and tracking subsystems, which are an essential adjunct to the long-haul optical communication channels that would be operated potentially from geosynchronous earth orbit (GEO) to ground. For such spacecraft applications high-powered laser diodes are likely be the required transmitter. Coupled with their potential operation in a vacuum or at partial atmospheric pressures, MEMS mirror shape stability and fabrication tolerances are of key concern to a system designer. To this end we have measured the performance of preliminary micro-mirror units in terms of angular jitter, focal spot stability, and open and closed-loop response versus laser transmitter power in both ambient air and at low partial pressures. We will describe the fabrication process as well as the experimental test configurations and results in the context of optical beamsteering. We will also discuss the applicability and scalability of this technology to multi-access terminals.

Citation Download Citation

Jeffry J. Sniegowski, Steven M. Rodgers, Bradley G. Boone, Jonathan R. Bruzzi, Chris W. Drabenstadt, Bernard E. Kluga, Eric W. Rogala, Robert Osiander, Keith J. Rebello, and Margaret A.G. Darrin "Development, test, and evaluation of MEMS micromirrors for free-space optical communications", Proc. SPIE 5550, Free-Space Laser Communications IV, (20 October 2004); https://doi.org/10.1117/12.562819

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available