Characterizing the demons in high-NA phase-shifting masks

Garth C. Robins; Andrew R. Neureuther

doi:10.1117/12.568758

6 December 2004 Characterizing the demons in high-NA phase-shifting masks

Garth C. Robins, Andrew R. Neureuther

Author Affiliations +

Proceedings Volume 5567, 24th Annual BACUS Symposium on Photomask Technology; (2004) https://doi.org/10.1117/12.568758
Event: Photomask Technology, 2004, Monterey, California, United States

Abstract

Aerial image measurements, SEM measurements from printed photoresist images, and simulations are used to characterize second-order effects due to mask topography, high-NA electric-field vector addition, and mask fabrication tolerances in projection printing of advanced process monitors on special phase-shifting test reticles. Challenging phase-shifting mask designs have been developed in collaboration with DuPont Photomask, Inc., Photronics Inc., ASMLithography, and Advanced MicroDevices for use as precision instruments to measure aberrations, system illumination, and the quality of the photomask itself. The results presented herein on pattern and probe-based aberration monitors show that, while the imaging of the probe portion of the target is dominated by errors in mask geometry and electromagnetic edge effects, high-NA effects play very little role in their image formation. The results also show that the full target suffers from mask edge electromagnetic effects and high-NA vector effects, implying that the ring patterns in the target emphasize those locations in the lens which are most susceptible to high-angle effects.

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Garth C. Robins and Andrew R. Neureuther "Characterizing the demons in high-NA phase-shifting masks", Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); https://doi.org/10.1117/12.568758

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