Fabrication and properties of F-doped silica glasses via sol-gel technique

Ken C. Cheng; Yuhuan Xu; Peter Sheu

doi:10.1117/12.583111

6 December 2004 Fabrication and properties of F-doped silica glasses via sol-gel technique

Ken C. Cheng, Yuhuan Xu, Peter Sheu

Proceedings Volume 5567, 24th Annual BACUS Symposium on Photomask Technology; (2004) https://doi.org/10.1117/12.583111
Event: Photomask Technology, 2004, Monterey, California, United States

Abstract

Ultra low OH, fluorine-doped silica glasses have been successfully synthesized via sol-gel technique. The maximum relative refractive index difference to pure silica of -1.0% is obtained. Characterization of various levels of fluorine-doped silica glasses was performed by measuring vacuum ultraviolet spectra. Fluorine concentration in silica glasses strongly depends on the gel formulation, and sintering conditions. We have developed VUV/DUV transmission optical materials in various geometries, such as plates, tubes and discs. Transmission more than 80% at 157 nm is achieved with various F-doping levels silica glasses for 6.35 mm thickness.

Citation Download Citation

Ken C. Cheng, Yuhuan Xu, and Peter Sheu "Fabrication and properties of F-doped silica glasses via sol-gel technique", Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); https://doi.org/10.1117/12.583111

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