Author Affiliations +
Peter Tichy,1 Takahiro Fukai,1 Shigenori Kamei,1 Hiroshi Asai,1 Tatsuhito Kotoda,1 Kazuhiro Takeshita,1 Tetsushi Miyamoto,1 Yoshiki Okamoto,1 Hideo Funakoshi,1 Shinji Koga,1 Shigemi Oono,1 Rusty Cantrell,2 Axel Feicke,2 Wolfram Porsche,2 Martin Tschinkl,2 Gaston Lee2
1Tokyo Electron Ltd. (Japan)
2Advanced Mask Technology Ctr. (Germany)