Full-chip model-based correction of flare-induced linewidth variation

James Word V; Jerome Belledent; Yorick Trouiller; Wilhelm Maurer; Yuri Granik; Emile Sahouria; Olivier Toublan

doi:10.1117/12.569175

6 December 2004 Full-chip-model-based correction of flare-induced linewidth variation

James Word V, Jerome Belledent, Yorick Trouiller, Wilhelm Maurer, Yuri Granik, Emile Sahouria, Olivier Toublan

Author Affiliations +

Proceedings Volume 5567, 24th Annual BACUS Symposium on Photomask Technology; (2004) https://doi.org/10.1117/12.569175
Event: Photomask Technology, 2004, Monterey, California, United States

Abstract

Scattered light in optical lithography, also known as flare, has been shown to cause potentially significant linewidth variation at low-k1 values. The interaction radius of this effect can extend essentially from zero to the full range of a product die and beyond. Because of this large interaction radius the correction of the effect can be very computation-intensive. In this paper, we will present the results of our work to characterize the flare effect for 65nm and 90nm poly processes, model that flare effect as a summation of gaussian convolution kernels, and correct it within a hierarchical model based OPC engine. Novel methods for model based correction of the flare effect, which preserve much of the design hierarchy, is discussed. The same technique has demonstrated the ability to correct for long-range loading effects encountered during the manufacture of reticles.

Citation Download Citation

James Word V, Jerome Belledent, Yorick Trouiller, Wilhelm Maurer, Yuri Granik, Emile Sahouria, and Olivier Toublan "Full-chip-model-based correction of flare-induced linewidth variation", Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); https://doi.org/10.1117/12.569175

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE