Development Of An Automated Image Shearing Microscope For Measuring The Critical Dimensions Of Magnetic Recording Heads.

Chris P. Kirk; Richard W. Gale

doi:10.1117/12.966251

19 December 1985 Development Of An Automated Image Shearing Microscope For Measuring The Critical Dimensions Of Magnetic Recording Heads.

Chris P. Kirk, Richard W. Gale

Author Affiliations +

Proceedings Volume 0557, Automatic Inspection and Measurement; (1985) https://doi.org/10.1117/12.966251
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

The development of an automated image shearing microscope for measuring the lengths of the gaps in magnetic recording heads is discussed. A model is developed for a manual measurement system and this is used to identify sources of measurement error. The architecture of an automated measurement system is described in detail. Algorithms for automating the measurement process are presented and the model is extended to analyse their performance. These algorithms include a method of finding a clean site, automatic focusing and automatic measurement based on image shearing. The effects of system parameters such as illumination bandwidth, focus error and transducer resolution are investigated and it is shown that gap lengths as narrow as 0.5um may be measured reliably. Experimental performance tests show that the system can measure gap lengths to better than 0.05μm (3a) reproducibility in under 4 seconds.

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Chris P. Kirk and Richard W. Gale "Development Of An Automated Image Shearing Microscope For Measuring The Critical Dimensions Of Magnetic Recording Heads.", Proc. SPIE 0557, Automatic Inspection and Measurement, (19 December 1985); https://doi.org/10.1117/12.966251

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