Paper
8 September 2004 Grating couplers for integrated optoelectronics: fabrication and characterization
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Proceedings Volume 5576, Lightguides and their Applications II; (2004) https://doi.org/10.1117/12.581737
Event: Lightguides and their Applications II, 2003, Krasnobrod, Poland
Abstract
Problem of efficient light coupling into planar waveguide structures was always a stumbling block for the designers of integrated optical circuits. In this article methods of light coupling into the planar waveguides are described. Comparison of two main approaches -- prism and grating coupling -- is given. Examples of grating coupler technology are presented also.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rafal Dylewicz and Sergiusz Z. Patela "Grating couplers for integrated optoelectronics: fabrication and characterization", Proc. SPIE 5576, Lightguides and their Applications II, (8 September 2004); https://doi.org/10.1117/12.581737
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Diffraction gratings

Waveguides

Prisms

Photoresist materials

Holography

Optical lithography

Thin films

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