Formation of densely populated SiOx microtree-like structures on the Si (100) surface using excimer laser irradiation in air

De-Quan Yang; Edward Sacher; Michel Meunier

doi:10.1117/12.567860

9 December 2004 Formation of densely populated SiOx microtree-like structures on the Si (100) surface using excimer laser irradiation in air

De-Quan Yang, Edward Sacher, Michel Meunier

Author Affiliations +

Proceedings Volume 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education; (2004) https://doi.org/10.1117/12.567860
Event: Photonics North, 2004, Ottawa, Ontario, Canada

Abstract

SiO_x microforest-like structures have been produced on Si (100) surfaces by pulsed excimer laser irradiation in air. Scanning electron microscopic observations have indicated these structures, which are composed of aggregated nanoparticles, to be 1-5 μm in diameter and 10-20 μm high, and to have the appearance of trees. XPS analysis has shown them to be composed of a-SiO_x (1

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De-Quan Yang, Edward Sacher, and Michel Meunier "Formation of densely populated SiOx microtree-like structures on the Si (100) surface using excimer laser irradiation in air", Proc. SPIE 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education, (9 December 2004); https://doi.org/10.1117/12.567860

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