Paper
19 January 2005 Electrostatic layer-by-layer nano-assembly: films, cantilevers, micropatterns, and nanocapsules
Dinesh Kommireddy, Jingshi Shi, Xiaodong Yan, Haifeng Ji, Yuri M. Lvov
Author Affiliations +
Proceedings Volume 5592, Nanofabrication: Technologies, Devices, and Applications; (2005) https://doi.org/10.1117/12.568046
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
Abstract
Layer-by-layer (LbL) nanoassembly in combination with traditional lithography and microfluidics was applied for the fabrication of ultrathin microcantilevers and for the modification of microchannel surface. Hundreds of cantilevers were fabricated on a silicon wafer simultaneously. The purpose is to develop chemical/biosensor arrays for parallel, massive data gathering. Microcantilever optical deflections were measured using a four-quadrant AFM head with integrated laser and position sensitive detector. In the second part, laminar flow fabrication of interpolyelectrolyte complexes was studied inside a microchannel. Polyelectrolyte micropatterns were studied using fluorescent confocal microscopy. Filament like, 15 μm, interpolyelectrolyte microstripes were formed at flow rate higher than 0.01 mL•min-1 and concentrations of the initial polyelectrolytes below 1 mg•mL-1. New, soft micropatterning technique for the anisotropic modification of polyelectrolyte nanocapsules was also demonstrated. The microchannel surface was made sensitive to pH by coating the surface of the channel with a pH sensitive dye using LbL assembly to control the reaction.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dinesh Kommireddy, Jingshi Shi, Xiaodong Yan, Haifeng Ji, and Yuri M. Lvov "Electrostatic layer-by-layer nano-assembly: films, cantilevers, micropatterns, and nanocapsules", Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); https://doi.org/10.1117/12.568046
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KEYWORDS
Microfluidics

Semiconducting wafers

Confocal microscopy

Nanoparticles

Microfabrication

Silicon

Lithography

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