Laterally deformable optical NEMS grating transducers for inertial sensing applications

Bianca E.N. Keeler; Gregory R. Bogart; Dustin W. Carr

doi:10.1117/12.571504

19 January 2005 Laterally deformable optical NEMS grating transducers for inertial sensing applications

Bianca E.N. Keeler, Gregory R. Bogart, Dustin W. Carr

Proceedings Volume 5592, Nanofabrication: Technologies, Devices, and Applications; (2005) https://doi.org/10.1117/12.571504
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

This paper discusses the use of laterally deformable optical nanoelectromechanical systems (NEMS) grating transducers for sensor applications. For very small changes in the spacing of the nanostructured grating elements, a large change in the optical reflection amplitude is observed, making this an ideal transducer element for detecting very small amounts of relative motion. These devices are also very sensitive to wavelength, and could thus be used as tunable elements for spectrometry, as well as communications or inertial sensing. This anomalous diffraction property was predicted in previous work; here, we experimentally verify operation of these devices and demonstrate a motion detection sensitivity of 10 fm/Hz^1/2, comparable to the most sensitive MEMS transducer. As optical devices, these sensors have additional advantages over electrical sensors, including high immunity to electromagnetic interference and the possibility of integration with fiber optics to create a network of sensors with a single remote optical source and detector.

Citation Download Citation

Bianca E.N. Keeler, Gregory R. Bogart, and Dustin W. Carr "Laterally deformable optical NEMS grating transducers for inertial sensing applications", Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); https://doi.org/10.1117/12.571504

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