Nanotechnology evolution in piezoelectric resonator sensors

John A. Kosinski

doi:10.1117/12.580329

19 January 2005 Nanotechnology evolution in piezoelectric resonator sensors

John A. Kosinski

Proceedings Volume 5592, Nanofabrication: Technologies, Devices, and Applications; (2005) https://doi.org/10.1117/12.580329
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

This paper surveys the ongoing evolution of piezoelectric resonator sensors from the micro-technology to the nano-technology regime. Topics covered include fundamental principles of operation, phenomena used for sensing, types of devices and design considerations, material systems, and fabrication. Particular attention is given to the use of piezoelectric resonators in passive wireless RF sensors.

Citation Download Citation

John A. Kosinski "Nanotechnology evolution in piezoelectric resonator sensors", Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); https://doi.org/10.1117/12.580329

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