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25 October 2004 Development of a nanoindenter using a piezoelectric actuator
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Proceedings Volume 5602, Optomechatronic Sensors, Actuators, and Control; (2004)
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
In this paper, we report an innovative depth-sensing nanoindenter using a lead zirconium titanate (PZT) stack actuator. The conventional nanoindenter requires two sensors and closed-loop controls for precise loading or positioning due to inherent high hysteresis and creep characteristics of the PZT actuators. On the other hand, we have shown that an open-loop positioning control scheme using a single displacement sensor can be used for nanoindentation. The developed control scheme compensates for the hysteresis and creep errors of PZT actuators. By adopting the single-sensor open-loop control, the overall system structure can be simplified and a robust control environment can be achieved. In addition, a high positioning repeatability was achieved by using a flexure type mainframe with a high preload applied to the PZT actuator. To verify the system performance, we conducted the standard indentation tests on a fused quartz sample, and the results were compared with those from a commercial nanoindenter. Besides the basic nanoindentation functions, the developed system also has the capability for surface imaging through a scanning function. The pre-indentation scanning capability proved to be a very useful method for positioning the tip in the desired indentation location. Similarly, post-indentation scanning allows for visualization of the indentation marks after the tests.
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Heung-Keun Park, Yong K. Hong, Sung Q Lee, Kee S. Moon, and Dongil Kwon "Development of a nanoindenter using a piezoelectric actuator", Proc. SPIE 5602, Optomechatronic Sensors, Actuators, and Control, (25 October 2004);

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