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25 October 2004 Multi-axis single-layer PDMS-on-silicon micro optical reflector
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This paper reports on a new micro optical reflector made of an organic elastomer, Polydimethylsiloxane (PDMS), which achieves multi-axis motion with a single actuator layer. The whole device structure incorporates Au-coated three-dimensional PDMS micro reflector integrated with electrostatic MEMS actuators on a silicon chip by a new fabrication method named "Soft-Lithographic Lift-Off and Grafting (SLLOG)" process. The SLLOG process is a low-temperature (less than 150°C) microfabrication technique that allows soft lithographically molded PDMS micro-structures to be integrated together with silicon micromachined device patterns. The developed PDMS/silicon hybrid device reflects visible light with fast response and large rotational motion through taking advantage of the mechanical compliance of PDMS structures. The demonstrated PDMS-based reflector can achieve 4.6 micron vertical displacement using AC actuation voltage of 40 V at frequency of 1.0 kHz, and ±1.43° scanning angles using AC actuation voltage of 40 V at resonant frequency of 5.0 kHz, and ±0.85° scanning angles for static operation at 60V.
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Yi-Chung Tung and Katsuo Kurabayashi "Multi-axis single-layer PDMS-on-silicon micro optical reflector", Proc. SPIE 5604, Optomechatronic Micro/Nano Components, Devices, and Systems, (25 October 2004);

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