Translator Disclaimer
Paper
25 October 2004 Scanning micromirrors: an overview
Author Affiliations +
Abstract
An overview of the current state of the art in scanning micromirror technology for switching, imaging, and beam steering applications is presented. The requirements that drive the design and fabrication technology are covered. Electrostatic, electromagnetic, and magnetic actuation techniques are discussed as well as the motivation toward combdrive configurations from parallel plate configurations for large diameter (mm range) scanners. Suitability of surface micromachining, bulk micromachining, and silicon on insulator (SOI) micromachining technology is presented in the context of the length scale and performance for given scanner applications.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pamela Rae Patterson, Dooyoung Hah, Makoto Fujino, Wibool Piyawattanametha, and Ming C. Wu "Scanning micromirrors: an overview", Proc. SPIE 5604, Optomechatronic Micro/Nano Components, Devices, and Systems, (25 October 2004); https://doi.org/10.1117/12.582849
PROCEEDINGS
13 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

MEMS scanners for display and imaging applications
Proceedings of SPIE (October 25 2004)
Recent advances in optical MEMS devices and systems
Proceedings of SPIE (November 15 2002)
Micromachined microscanners for optical scanning
Proceedings of SPIE (April 11 1997)
Two-axis micromirror scanner
Proceedings of SPIE (July 02 1999)

Back to Top