Holographic lithography for electroforming submicrometric structures

L. E. Gutierrez R.; Lucila H. D. Cescato; E. J. Carvalho

doi:10.1117/12.592175

21 October 2004 Holographic lithography for electroforming submicrometric structures

L. E. Gutierrez R., Lucila H. D. Cescato, E. J. Carvalho

Proceedings Volume 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications; (2004) https://doi.org/10.1117/12.592175
Event: 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, 2004, Porlamar, Venezuela

Abstract

In this paper we proposed and demonstrated the association of holographic lithography with electroforming to produce submicrometric metallic structures. To demonstrate the potential of the technique, different types of submicrometric metallic structures were generated: periodic lines, nano-tunnels and arrays of holes. Such structures can met different applications from optics to micromechanical systems.

Citation Download Citation

L. E. Gutierrez R., Lucila H. D. Cescato, and E. J. Carvalho "Holographic lithography for electroforming submicrometric structures", Proc. SPIE 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, (21 October 2004); https://doi.org/10.1117/12.592175

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