Finite element simulation for a micro-machined cantilever optical switch

Ying Wang; Mudi Xiong; Tong Li

doi:10.1117/12.574216

11 February 2005 Finite element simulation for a micro-machined cantilever optical switch

Ying Wang, Mudi Xiong, Tong Li

Proceedings Volume 5625, Optical Transmission, Switching, and Subsystems II; (2005) https://doi.org/10.1117/12.574216
Event: Asia-Pacific Optical Communications, 2004, Beijing, China

Abstract

In this paper, the principle of a cantilever-beam micro-mechanical switch with SiO2 optical waveguide on silicon is described, and the solid model of the switch is established and finite element method (FEM) is used in studying its dynamic characteristics. Under different parameters, the modal characteristics are simulated and analyzed. The influence of the switch structural dimension on the resonant frequency and dynamic characteristics of the switch are investigated, and the harmonic response of the micro-mechanical optical switch is achieved. The results of analysis offers reliable basis for the structure design of the micro-machined cantilever optical switch.

Citation Download Citation

Ying Wang, Mudi Xiong, and Tong Li "Finite element simulation for a micro-machined cantilever optical switch", Proc. SPIE 5625, Optical Transmission, Switching, and Subsystems II, (11 February 2005); https://doi.org/10.1117/12.574216

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KEYWORDS

Optical switching

Switches

Switching

Finite element methods

Silicon

Optical components

Optics manufacturing

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