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11 February 2005 Finite element simulation for a micro-machined cantilever optical switch
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Proceedings Volume 5625, Optical Transmission, Switching, and Subsystems II; (2005) https://doi.org/10.1117/12.574216
Event: Asia-Pacific Optical Communications, 2004, Beijing, China
Abstract
In this paper, the principle of a cantilever-beam micro-mechanical switch with SiO2 optical waveguide on silicon is described, and the solid model of the switch is established and finite element method (FEM) is used in studying its dynamic characteristics. Under different parameters, the modal characteristics are simulated and analyzed. The influence of the switch structural dimension on the resonant frequency and dynamic characteristics of the switch are investigated, and the harmonic response of the micro-mechanical optical switch is achieved. The results of analysis offers reliable basis for the structure design of the micro-machined cantilever optical switch.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ying Wang, Mudi Xiong, and Tong Li "Finite element simulation for a micro-machined cantilever optical switch", Proc. SPIE 5625, Optical Transmission, Switching, and Subsystems II, (11 February 2005); https://doi.org/10.1117/12.574216
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