Figure Tolerancing Study of an Axisymmetric X-ray Microscope

T. F. Zehnpfennig

doi:10.1117/12.949654

6 May 1985 Figure Tolerancing Study of an Axisymmetric X-ray Microscope

T. F. Zehnpfennig

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949654
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

The effects of various types of figure defects and misalignments on the imaging proper-ties of a grazing incidence x-ray microscope were investigated in detail using a special ray tracing program. The microscope, designed for use as a diagnostic instrument in laser fusion research, was of the Wolter Type-1 configuration, consisting of an ellipsoid and a confocal, coaxial hyperboloid. Figure tolerances which were investigated included those on roundness, the average slope, the mean diameter, and the variation in average slope with azimuthal position. The effects of surface ripples both in and out of the plane of the incidence were studied. The effects of angular and translational misalignments between the ellipsoid and the hyperboloid were investigated. The results of these tolerancing studies are summarized, and the tolerance budget which was then used to govern the fabrication process is described.

Citation Download Citation

T. F. Zehnpfennig "Figure Tolerancing Study of an Axisymmetric X-ray Microscope", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949654

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