Thin Films And Gratings: Theories Used To Optimize The High Reflectivity Of Mirrors And Gratings For X-Ray Optics

B. Vidal; P. Vincent; P. Dhez; M. Neviere

doi:10.1117/12.949661

6 May 1985 Thin Films And Gratings: Theories Used To Optimize The High Reflectivity Of Mirrors And Gratings For X-Ray Optics

B. Vidal, P. Vincent, P. Dhez, M. Neviere

Author Affiliations +

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949661
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

Near normal incidence is necessary to design low aberrations X-Ray systems. High reflectivity may be obtained with suitable multilayers deposited on gratings. Classical thin film theories previously used for analysis and synthesis of dielectric multilayers for the visible spectral region are applied in this paper in the UV and soft X-ray range. The optimal multilayer determined by these methods can be deposited onto a grating in order to increase its efficiency. For incidence angles lower than 40; and low wavelength-to-groove-spacing ratios, the efficiency of the total system may be predicted with a scalar theory. Then, the reflectivity is the product of the efficiency red on a universal grating efficiency curve by the multilayer reflectivity. Results will be given for several gratings geometries and various multilayers.

Citation Download Citation

B. Vidal, P. Vincent, P. Dhez, and M. Neviere "Thin Films And Gratings: Theories Used To Optimize The High Reflectivity Of Mirrors And Gratings For X-Ray Optics", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949661

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