A novel aspheric surface testing method using part-compensating lens

Huilan Liu; Qun Hao; Qiudong Zhu; Dingguo Sha; Chunxi Zhang

doi:10.1117/12.578624

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10 February 2005 A novel aspheric surface testing method using part-compensating lens

Huilan Liu, Qun Hao, Qiudong Zhu, Dingguo Sha, Chunxi Zhang

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Proceedings Volume 5638, Optical Design and Testing II; (2005) https://doi.org/10.1117/12.578624
Event: Photonics Asia, 2004, Beijing, China

Abstract

In contrast to null compensator method in aspheric surface testing, a novel method is presented that uses part-compensating lens and digital moire phase-shift interferometry. Researches are made on measurement principle, design method of part-compensating lens and calibrating lens, and calibrating method. Experiment is made by using spherical surface to simulate aspheric surface testing. The measurement precision is that the P-V value of the testing error can be λ/10. Using the method presented in this paper, the structure of compensator is much simpler than that of null compensator. And one part-compensating lens can be used to test different aspheric surfaces in certain range.

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Huilan Liu, Qun Hao, Qiudong Zhu, Dingguo Sha, and Chunxi Zhang "A novel aspheric surface testing method using part-compensating lens", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); https://doi.org/10.1117/12.578624

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