Paper
10 February 2005 Noncontact thickness measurement of metal foil by means of differential white light interferometry
Yanli Du, Huimin Yan, Yong Wu, Xiaoqiang Yao, Yongjun Nie, Baixuan Shi
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Abstract
A new differential white light interference technique for the thickness measurement of metal foil is presented. In this work, the differential white light system consists of two Michelson Interferometers (MI) in tandem, of which reflective surfaces measured are corresponding surfaces of metal foil. Therefore, the measured result only relates to the thickness but not to the position of metal foil. The method is non-contact, non-destructive, has advantage of high accuracy, fast detection and compact structure. Theoretical analysis and preliminary experimental results have shown that the technique can measure the thickness of foil in the range of 1 μm to 80 μm with satisfactory accuracy and repeatability.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yanli Du, Huimin Yan, Yong Wu, Xiaoqiang Yao, Yongjun Nie, and Baixuan Shi "Noncontact thickness measurement of metal foil by means of differential white light interferometry", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); https://doi.org/10.1117/12.576056
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Cited by 2 scholarly publications.
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KEYWORDS
Metals

Spectroscopy

Calibration

Ocean optics

Signal processing

Charge-coupled devices

Halogens

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