The performance of micromachined membrane deformable mirror for adaptive optics

Ende Li; Haifeng Duan; Yun Dai; Haiying Wang; Kai Chen; Yudong Zhang

doi:10.1117/12.580424

23 December 2004 The performance of micromachined membrane deformable mirror for adaptive optics

Ende Li, Haifeng Duan, Yun Dai, Haiying Wang, Kai Chen, Yudong Zhang

Proceedings Volume 5639, Adaptive Optics and Applications III; (2004) https://doi.org/10.1117/12.580424
Event: Photonics Asia, 2004, Beijing, China

Abstract

The voltage-decoupling model for a 37-channel micromachined membrane deformable mirror is established through theoretically and experimentally analyzing the fitting aberration of a continuous-surface deformable mirror. The function between voltage and displacement of an actuator, the linear superposing among the actuators for micromachined membrane deformable mirror are analyzed by means of the measured influence function of actuators. The fitting of the first 36-order Zernike mode is carried out. The analysis shows that micromachined membrane deformable mirror can be applied to correcting low order aberration. This research provides the basis and guideline for designing the adaptive optical system based on micromachined membrane deformable mirror, thus offers a theoretical basis and reference for the application of the deformable mirror.

Citation Download Citation

Ende Li, Haifeng Duan, Yun Dai, Haiying Wang, Kai Chen, and Yudong Zhang "The performance of micromachined membrane deformable mirror for adaptive optics", Proc. SPIE 5639, Adaptive Optics and Applications III, (23 December 2004); https://doi.org/10.1117/12.580424

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available