Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm

Ming Li; Ming Wang; Tinting Wang; Hua Rong; Xuxing Chen

doi:10.1117/12.573685

30 December 2004 Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm

Ming Li, Ming Wang, Tinting Wang, Hua Rong, Xuxing Chen

Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.573685
Event: Photonics Asia, 2004, Beijing, China

Abstract

An optical MEMS pressure sensor based on multi-layer circular diaphragm has been analyzed by utilizing the shell theory and characteristic matrix methods. Finite element methods are used to analyze the deflection of circular diaphragm with the residual stress effect considered. Simulation results are given by using FEM software tools ANSYS. The analytic expressions for the absolute reflectance of multi-layer circular diaphragm structure are derived. The results are valid for the most optical MEMS pressure sensors based on Fabry-Perot interferometer.

Citation Download Citation

Ming Li, Ming Wang, Tinting Wang, Hua Rong, and Xuxing Chen "Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.573685

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available