Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm

Ming Li; Ming Wang; Tinting Wang; Hua Rong; Xuxing Chen

doi:10.1117/12.573685

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30 December 2004 Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm

Ming Li, Ming Wang, Tinting Wang, Hua Rong, Xuxing Chen

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Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.573685
Event: Photonics Asia, 2004, Beijing, China

Abstract

An optical MEMS pressure sensor based on multi-layer circular diaphragm has been analyzed by utilizing the shell theory and characteristic matrix methods. Finite element methods are used to analyze the deflection of circular diaphragm with the residual stress effect considered. Simulation results are given by using FEM software tools ANSYS. The analytic expressions for the absolute reflectance of multi-layer circular diaphragm structure are derived. The results are valid for the most optical MEMS pressure sensors based on Fabry-Perot interferometer.

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Ming Li, Ming Wang, Tinting Wang, Hua Rong, and Xuxing Chen "Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.573685

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