Translator Disclaimer
30 December 2004 Fabrication and application of a novel freestanding stencil bi-material cantilever structure
Author Affiliations +
This paper reports a novel freestanding stencil bi-material cantilever structure without sacrificial layer process in detail; the complexity and costs of fabrication process are reduced greatly. This type of microcantilever is made of two material layers (SiNx/Au), which is a 2dimension device, not a 3dimension one. The cantilevers and the support points are at the same plane in the stencil structure. MEMS sacrificial layer process problems are avoided completely in the process of the freestanding stencil bi-material cantilever microstructure so as to simplify process steps. Since two materials selected in the bi-material cantilever have a large mismatch in thermal conductivity and expansion coefficient, and all cantilevers in the device are freestanding completely, this kind of device is sensitive to a lot of physical varieties, such as thermal, infrared, mechanical vibration and electronic signals. This paper illuminates the total fabrication process of freestanding stencil bi-material cantilever structure; and in particular presents an application of uncooled infrared imaging system based on the novel freestanding bi-material cantilever structure in the final part of this paper.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Weibing Wang, Dapeng Chen, Tianchun Ye, Liang Pan, Qingchuan Zhang, and Xiaoping Wu "Fabrication and application of a novel freestanding stencil bi-material cantilever structure", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004);


"Progress In Schottky-Barrier IR Imagers"
Proceedings of SPIE (September 20 1987)
Sprite Detectors And Staring Arrays In Hgl_xCdxTe
Proceedings of SPIE (May 03 1988)
Infrared vision using uncooled optomechanical camera
Proceedings of SPIE (April 13 2000)
State of the art in Schottky-barrier IR image sensors
Proceedings of SPIE (September 01 1992)
Third-generation infrared imagers
Proceedings of SPIE (December 15 2000)
"Infrared Image Sensors With Schottky-Barrier Detectors"
Proceedings of SPIE (March 31 1988)

Back to Top