Microfabrication assisted by laser-trapped microparticle tools

Jian Bai; Zen-rong Zhu-ge; Xiao-na Wang; Xiyun Hou; Guoguang Yang

doi:10.1117/12.576129

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30 December 2004 Microfabrication assisted by laser-trapped microparticle tools

Jian Bai, Zen-rong Zhu-ge, Xiao-na Wang, Xiyun Hou, Guoguang Yang

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Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.576129
Event: Photonics Asia, 2004, Beijing, China

Abstract

A novel micro-fabrication technology using optical radiation pressure is presented. A simulation program has been written and simulation results have demonstrated that micro silica or diamond particles, trapped by focused laser beam, could be used as micro-fabrication tools for nanometer manufacturing. An experiment setup for laser trapping has been established and Silica particles, with diameter of 8 μm, has been successfully trapped in water and arbitrary-shaped diamond particles, whose size is about 3-8 μm, has been trapped and rotated as micro-fabrication tools. When trapped rigidity micro-particles tools was controlled by laser beam, the work stage was horizontally moved repeatedly so that a machining trace of 2nm on work piece has been attained.

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Jian Bai, Zen-rong Zhu-ge, Xiao-na Wang, Xiyun Hou, and Guoguang Yang "Microfabrication assisted by laser-trapped microparticle tools", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.576129

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