Study on application and analysis of a microaccelerometer with magnetorheological fluids

Zhonghua Lin; Huinan Hong; Guoqing Hu; Wenyan Liu; Huijie Zhang; Lingling Lin

doi:10.1117/12.569574

30 December 2004 Study on application and analysis of a microaccelerometer with magnetorheological fluids

Zhonghua Lin, Huinan Hong, Guoqing Hu, Wenyan Liu, Huijie Zhang, Lingling Lin

Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.569574
Event: Photonics Asia, 2004, Beijing, China

Abstract

A new type microaccelerometer with magnetorheological (MR) fluids is presented in this paper. MR fluids can easily change from a fluid state to a semi-solid state in milliseconds when exposed to magnetic field. They are applied to the microaccelerometer where the MR fluids can vary the relative dielectric constant and provide damping. Then the electrostatic force has been adopted in the microaccelerometer for balancing force. Therefore, the measurement range of the microaccelerometer will be expanded. The mathematical model of the microaccelerometer with MR fluids is derived. The curve of the accelerometer between the deflection of the silicon doubly-supported beam and voltage has been simulated. The curves of the accelerometer between the voltage and the acceleration are also got. Last, the stability of the microaccelerometer system has been analyzed.

Citation Download Citation

Zhonghua Lin, Huinan Hong, Guoqing Hu, Wenyan Liu, Huijie Zhang, and Lingling Lin "Study on application and analysis of a microaccelerometer with magnetorheological fluids", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.569574

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available