Fabrication and characterization of a new type 4×4 arrayed position-sensitive detector

Xunjun Qi; Bin Lin; Dongyan Chen; Yuqing Chen

doi:10.1117/12.568243

17 January 2005 Fabrication and characterization of a new type 4×4 arrayed position-sensitive detector

Xunjun Qi, Bin Lin, Dongyan Chen, Yuqing Chen

Proceedings Volume 5644, Optoelectronic Devices and Integration; (2005) https://doi.org/10.1117/12.568243
Event: Photonics Asia, 2004, Beijing, China

Abstract

Position sensitive detectors (PSD) use the lateral photo effect to determine the centroid position of an incident light spot focused on it. A 65-pin ceramic packaged 4×4 arrayed position sensitive detector was fabricated first time as a new prototype of Hartmann-Shack wavefront sensor. The detector, consisting of 16 tetra-lateral sensitive areas, is a p-n-n+ configuration made on 3-inch <111> n-type high resistance crystal silicon substrate. A 100nm antireflection SiO₂ thin film was formed on the surface and a multi-layer cover glass with transmissivity > 98% from 400nm to 950nm. The main parameters of the arrayed as wavefront detector, such as reverse voltage, dark current photosensitivity, response time were reported in the paper.

Citation Download Citation

Xunjun Qi, Bin Lin, Dongyan Chen, and Yuqing Chen "Fabrication and characterization of a new type 4×4 arrayed position-sensitive detector", Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005); https://doi.org/10.1117/12.568243

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