A new method to determine the energy range for the FOCAL technique

Dongqing Zhang; Xiangzhao Wang; Weijie Shi; Fan Wang; Liping Guo; Jianming Hu; Mingying Ma; Le He

doi:10.1117/12.573815

27 January 2005 A new method to determine the energy range for the FOCAL technique

Dongqing Zhang, Xiangzhao Wang, Weijie Shi, Fan Wang, Liping Guo, Jianming Hu, Mingying Ma, Le He

Proceedings Volume 5645, Advanced Microlithography Technologies; (2005) https://doi.org/10.1117/12.573815
Event: Photonics Asia, 2004, Beijing, China

Abstract

An effective and simple method to determine the energy range of FOCAL is described in this paper. Relationship between the chop line width and defocus is analyzed. Simulated curves of the chop line width versus defocus are obtained by PROLITH. By choosing the curves which satisfy certain conditions, the energy range of FOCAL is determined off line. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, PEB temperature, PEB time and development time, on the energy range of FOCAL are analyzed.

Citation Download Citation

Dongqing Zhang, Xiangzhao Wang, Weijie Shi, Fan Wang, Liping Guo, Jianming Hu, Mingying Ma, and Le He "A new method to determine the energy range for the FOCAL technique", Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); https://doi.org/10.1117/12.573815

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available