Microfabrication technology by femtosecond laser direct scanning using two-photon photo-polymerization

Ming Zhou; Li-Peng Liu; Qi-Xun Dai; Chuan-Peng Pan

doi:10.1117/12.574589

27 January 2005 Microfabrication technology by femtosecond laser direct scanning using two-photon photo-polymerization

Ming Zhou, Li-Peng Liu, Qi-Xun Dai, Chuan-Peng Pan

Proceedings Volume 5645, Advanced Microlithography Technologies; (2005) https://doi.org/10.1117/12.574589
Event: Photonics Asia, 2004, Beijing, China

Abstract

Two-photon absorption (TPA) is confined at the focus under tight-focusing conditions, which provides a novel concept for micro-fabrication using two-photon photo-polymerization in resin. The development of three-dimensional micro-fabrication by femtosecond laser was introduced at first, then the merits of femtosecond two-photon photo-polymerization was expatiated. Femtosecond laser direct scanning three-dimensional (3D) micro-fabrication system was set up and corresponding controlling software was developed. We demonstrated a fabrication of three-dimensional microstructures using photo-polymerization of resin by two-photon absorption. The precision of micro-machining and the spatial resolution reached 1um because of TPA. The dependence of fabricated line width to the micro-fabrication speed was investigated. Benzene ring, CHINA and layer-by-layer of log structures were fabricated in this 3D- micro-fabrication system as examples.

Citation Download Citation

Ming Zhou, Li-Peng Liu, Qi-Xun Dai, and Chuan-Peng Pan "Microfabrication technology by femtosecond laser direct scanning using two-photon photo-polymerization", Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); https://doi.org/10.1117/12.574589

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