Laser induced fluorocarbon coating onto fused silica optics

Takayuki Funatsu; Masataka M. Murahara; Takayuki Okamoto

doi:10.1117/12.588387

21 February 2005 Laser-induced fluorocarbon coating onto fused silica optics

Takayuki Funatsu, Masataka M. Murahara, Takayuki Okamoto

Proceedings Volume 5647, Laser-Induced Damage in Optical Materials: 2004; (2005) https://doi.org/10.1117/12.588387
Event: Boulder Damage Symposium XXXVI, 2004, Boulder, Colorado, United States

Abstract

The fluorocarbon thin film and fused silica glass was bonded for an ArF laser light transmittance by using silicon oil. The chemical main structure of the silicon oil has siloxane chains as in the same structure of quartz. This new bonding method was developed with silicone oil and excimer-lamp in an oxygen atmosphere. The silicone oil was put between the fused silica glass and the fluorocarbon (FEP), and an excimer-lamp was irradiated. The silicon oil ((-O-Si(CH3)-O)n) was photo-dissociated and reacted with the oxygen adsorbed on the silica glass surface to produce a SiO2. On the other hand, the H atoms photo-dissociated from the silicon oil pulled out the F atoms of the FEP. As a result, the FEP and the silica glass were combined. The results showed that the silicon oil changed to silica glass by the excited oxygen, which improved the UV rays under 200nm transmittance.

Citation Download Citation

Takayuki Funatsu, Masataka M. Murahara, and Takayuki Okamoto "Laser-induced fluorocarbon coating onto fused silica optics", Proc. SPIE 5647, Laser-Induced Damage in Optical Materials: 2004, (21 February 2005); https://doi.org/10.1117/12.588387

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