Self-assembled GaAs micromirrors monolithically integrated with LEDs

Nethaji Dharmarasu; Kazuyoshi Kubota; Shanmugam Saravanan; Pablo Oscar Vaccaro; Nobuo Saito

doi:10.1117/12.582315

23 February 2005 Self-assembled GaAs micromirrors monolithically integrated with LEDs

Nethaji Dharmarasu, Kazuyoshi Kubota, Shanmugam Saravanan, Pablo Oscar Vaccaro, Nobuo Saito

Proceedings Volume 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II; (2005) https://doi.org/10.1117/12.582315
Event: Smart Materials, Nano-, and Micro-Smart Systems, 2004, Sydney, Australia

Abstract

We present the results on the monolithic integration of self-assembled GaAs micromirrors with light emitting diodes. The micromirrors were self-assembled by the strain-driven mechanism, which control the micromirror standing position and flatness. The device epi-layer structure and the fabrication processes were optimized. Self-locking mechanism was also employed to precisely position and enhance the mechanical strength of the assembled micromirrors. Light emission was observed on the integrated devices. For the first time, the effectiveness of the self-assembled micromirrors was confirmed in the monolithic integration with LEDs on GaAs. This result shows the feasibility of GaAs-based micro-opto-electromechanical systems for photonics applications.

Citation Download Citation

Nethaji Dharmarasu, Kazuyoshi Kubota, Shanmugam Saravanan, Pablo Oscar Vaccaro, and Nobuo Saito "Self-assembled GaAs micromirrors monolithically integrated with LEDs", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); https://doi.org/10.1117/12.582315

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