Fabrication of nanograting inside transparent materials by using a single femtosecond laser beam

Yasuhiko Shimotsuma; Jianrong Qiu; Peter G. Kazansky; Kazuyuki Hirao

doi:10.1117/12.596318

8 October 2004 Fabrication of nanograting inside transparent materials by using a single femtosecond laser beam

Yasuhiko Shimotsuma, Jianrong Qiu, Peter G. Kazansky, Kazuyuki Hirao

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596318
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Femtosecond laser is under intense study as a new laser processing tool which can induce refractive index change and color center, etc. inside of transparent materials. Here, we report on the first observation of the formation of polarization-dependent nano-grating by irradiation of only single femtosecond laser beam inside silica glasses. This nano-grating was formed by the self-organization at intervals of 200 nm of generated oxygen defect in the laser focal point. The direction of nano-grating was controllable by laser polarization direction. Additionally, the periodicity was variable according to the irradiation laser light of energy and pulse number. We proposed a mechanism of this novel phenomenon containing the interference between the laser light (photon) and the generated plasma wave on the focal point.

Citation Download Citation

Yasuhiko Shimotsuma, Jianrong Qiu, Peter G. Kazansky, and Kazuyuki Hirao "Fabrication of nanograting inside transparent materials by using a single femtosecond laser beam", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596318

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