Nanomachining of inorganic transparent materials using an x-ray exciton method

Tetsuya Makimura; Yoichi Kenmotsu; Hisao Miyamoto; Michiaki Mori; Kiminori Kondo; Kouichi Murakami

doi:10.1117/12.596284

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8 October 2004 Nanomachining of inorganic transparent materials using an x-ray exciton method

Tetsuya Makimura, Yoichi Kenmotsu, Hisao Miyamoto, Michiaki Mori, Kiminori Kondo, Kouichi Murakami

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Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596284
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

We have investigated microfabrication of inorganic transparent materials using laser plasma soft X-rays with the diffraction limit of 10 nm. As a soft X-ray source, we used Ta laser plasma soft X-rays, whch has a light emission band at around 10 nm. A SiO₂ film was confirmed to have absorption band in the soft X-ray region. Micromachining a quartz plate was demonstrated by irradiation with focused soft X-rays and pulsed 266 nm Nd:YAG laser light. The quartz plates are ablated smoothly at 85 nm/shots. It is found that more than 40% of 266 nm laser light is absorbed by the quartz plates just after soft X-ray irradiation at room temperature. Thus, it is shown that a transient state such as an X-ray generated exciton (X-ray exciton), which have absorption band in UV region, are generated by soft X-ray irradiation. The micromachining technique (X-ray exciton method) can utilize the high space resolution of soft X-ray and the high energy density of conventional UV/visible laser light. Further, we found that a variety of materials such as SiO₂, LiNO₃, Si, CaF₂, LiF and Al₂O₃ are ablated smoothly by irradiation of the focused laser plasma soft X-rays without 266 nm laser light.

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Tetsuya Makimura, Yoichi Kenmotsu, Hisao Miyamoto, Michiaki Mori, Kiminori Kondo, and Kouichi Murakami "Nanomachining of inorganic transparent materials using an x-ray exciton method", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596284

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