Replicating polymer micro-fluidic devices using laser-fabricated glass-ceramic stamps

Joohan Kim; Xianfan Xu

doi:10.1117/12.596296

8 October 2004 Replicating polymer micro-fluidic devices using laser-fabricated glass-ceramic stamps

Joohan Kim, Xianfan Xu

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596296
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Laser-based mass production of micro structures may not be suitable in many cases because it is a serial process: devices are fabricated one by one only. Replication techniques for fabricating nano/micro structures have been investigated and developed for a long time and in our work, we present replicating micro structures in polymers using laser fabricated glass-ceramic stamps. A micro stamping process applying heat and pressure, also referred to as hot embossing, can replicate micro structures on polymer surfaces. By reforming thermoplastics, micro features can be transferred to polymer surfaces. Hot embossing normally employs metal and or silicon stamps. In this work, we use a glass-ceramic stamp which can be easily and quickly fabricated with a laser-based pattern transferring technique. In addition, a micro stamping device has been designed and developed for this process. Many micro structures such as micro channels, capillaries, and micro diffusers are produced and the advantages of this process are discussed.

Citation Download Citation

Joohan Kim and Xianfan Xu "Replicating polymer micro-fluidic devices using laser-fabricated glass-ceramic stamps", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596296

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KEYWORDS

Polymers

Crystals

Etching

Fabrication

Excimer lasers

Metals

Glasses

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