Wide band-gap materials microprocessing by femtosecond laser pulses

Egidijus Vanagas; Jouji Kawai; Yury Zaparozhchanka; Dmitry Tuzhilin; Hirofumi Musasa; Pavel Rutkovski; Igor Kudryashov; Shoji Suruga

doi:10.1117/12.596595

8 October 2004 Wide band-gap materials microprocessing by femtosecond laser pulses

Egidijus Vanagas, Jouji Kawai, Yury Zaparozhchanka, Dmitry Tuzhilin, Hirofumi Musasa, Pavel Rutkovski, Igor Kudryashov, Shoji Suruga

Author Affiliations +

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596595
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

The experimental results of wide band-gap materials treatment by femtosecond laser pulses are presented and discussed. Borosilicate glass drilling in air and vacuum, the surface and in-bulk three-dimensional laser processing with sub-micrometer resolution are subject of investigatios. Technical issues relevant for achieving high spatial resolution in order to meet requirements of nanotechnology at feature size smaller than 10 nm along with the issues of fabrication efficiency are outlined. Also, we show a concept of modular laser processing system, which can be flexibly optimized for processing by femtosecond laser pulses.

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Egidijus Vanagas, Jouji Kawai, Yury Zaparozhchanka, Dmitry Tuzhilin, Hirofumi Musasa, Pavel Rutkovski, Igor Kudryashov, and Shoji Suruga "Wide band-gap materials microprocessing by femtosecond laser pulses", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596595

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