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11 December 1985 Backside Charging Of The CCD
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Until recently, the usefulness of the charge coupled device (CCD) as an imaging sensor was thought to be restricted to within rather narrow boundaries of the visible and near IR spectrum. However, since the discovery of backside charging the full potential of CCD performance is now realized. Indeed, the technique of backside charging not only allows the CCD to be used directly in the UV, EUV, and soft X-ray regimes, it has opened up new opportunities in optimizing charge collection processes as well. In this paper, we discuss in considerable detail the technique of backside charging, describing its properties, use, and potential in the future as it applies to the CCD.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James Janesick, Tom Elliott, Taher Daud, and Jim McCarthy "Backside Charging Of The CCD", Proc. SPIE 0570, Solid-State Imaging Arrays, (11 December 1985);


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