Phosphorus-doped diamond-like carbon films deposited by plasma-assisted free electron and ArF laser ablation method

Kaoru Suzuki

doi:10.1117/12.590972

12 April 2005 Phosphorus-doped diamond-like carbon films deposited by plasma-assisted free electron and ArF laser ablation method

Kaoru Suzuki

Author Affiliations +

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.590972
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

Phosphorous doped diamond like carbon (DLC) films deposited on a p-type silcon (or quartz) substrate by plasma assisted laser ablation method for fabrication of photovoltaic solar cells. Frozen benzene and spread trimethyl-phosphate target or phosphorous powder mixing pressed graphite carbon target was ablated by free electron laser (resonance absorption wave length of benzene : 1680 nm) or ArF excimer laser (wave length : 193 nm). In order to etch the oxygen in plume of benzene and trimethyl-phsophate, inductively coupled hydrogen plasma by radio frequency (frequency :13.6 MHz) discharge flow between target and substrate. Effect of resonance excitation of benzene target by turning free electron laser or directly photon energy excitation by ArF excimer laser were discussed for widely band gap, larger short-circuit current density and open-circuit voltage at solar cell.

Citation Download Citation

Kaoru Suzuki "Phosphorus-doped diamond-like carbon films deposited by plasma-assisted free electron and ArF laser ablation method", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.590972

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