Surface microfabrication of silica glass by LIBWE using DPSS-UV laser

Hiroyuki Niino; Yoshizo Kawaguchi; Tadatake Sato; Aiko Narazaki; Ryozo Kurosaki

doi:10.1117/12.589933

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12 April 2005 Surface microfabrication of silica glass by LIBWE using DPSS-UV laser

Hiroyuki Niino, Yoshizo Kawaguchi, Tadatake Sato, Aiko Narazaki, Ryozo Kurosaki

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Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.589933
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

Surface micro-structuring of silica glass plates was performed by using laser-induced backside wet etching (LIBWE) upon irradiation with a single-mode laser beam from a diode-pumped solid state UV laser at 266 nm. We have succeeded in a well-defined micro-pattern formation without debris and microcrack formations around the etched area on the basis of Galvanometer-based point scanning system with the laser beam. This method is suitable for rapid prototyping and rapid manufacturing of surface microstructuing of silica glass in a convetional atmospheric environment.

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Hiroyuki Niino, Yoshizo Kawaguchi, Tadatake Sato, Aiko Narazaki, and Ryozo Kurosaki "Surface microfabrication of silica glass by LIBWE using DPSS-UV laser", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.589933

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