The new technology of the materials process: microvia formation by CO2 laser drilling machine

Ming-Fei Chen; Yu-Pin Chen

doi:10.1117/12.593087

12 April 2005 The new technology of the materials process: microvia formation by CO₂ laser drilling machine

Ming-Fei Chen, Yu-Pin Chen

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.593087
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

The purpose of this paper is the microvia results of different materials (RCC, FR4 and Cu) using CO₂ laser drilling machine at the wavelength of 10600 nm. We investigated the mechanism of this process with CO₂ laser and the microvia results of different materials. The microvia with a diameter up to 150 microns through laser drilling are presented. In this paper we report the results of a dielectric material such as the RCC and FR4 which used the different parameter of laser. In addition, the high power required for drilling copper foil compared to the resin material is due to the low absorption and high reflection of copper around 10600 nm wavelengths. We will present the method of the copper drilling based on a CO₂ laser drilling machine system which used the low power.

Citation Download Citation

Ming-Fei Chen and Yu-Pin Chen "The new technology of the materials process: microvia formation by CO₂ laser drilling machine", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.593087

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